Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
نویسندگان
چکیده
منابع مشابه
Atomic Layer Deposition of Aluminum Oxide
I Acknowledgements II Dedication III List of Figures V
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ژورنال
عنوان ژورنال: Chemistry of Materials
سال: 2014
ISSN: 0897-4756,1520-5002
DOI: 10.1021/cm503587w